diff --git a/arch/arm/src/armv6-m/Toolchain.defs b/arch/arm/src/armv6-m/Toolchain.defs
index ab43bed307..2a105f9168 100644
--- a/arch/arm/src/armv6-m/Toolchain.defs
+++ b/arch/arm/src/armv6-m/Toolchain.defs
@@ -30,7 +30,7 @@ LLVM_CPUTYPE  := cortex-m0
 # Clang Configuration files
 
 ifeq ($(CONFIG_ARM_TOOLCHAIN_CLANG),y)
-  TOOLCHAIN_MARCH := --config armv6m_soft_nofp_nosys
+  TOOLCHAIN_CLANG_CONFIG = --config armv6m_soft_nofp
 else ifeq ($(CONFIG_ARM_TOOLCHAIN_ARMCLANG),y)
   LDFLAGS += --cpu=Cortex-M0
 endif
diff --git a/arch/arm/src/armv7-m/Toolchain.defs b/arch/arm/src/armv7-m/Toolchain.defs
index d5a5a151b9..bee4b56803 100644
--- a/arch/arm/src/armv7-m/Toolchain.defs
+++ b/arch/arm/src/armv7-m/Toolchain.defs
@@ -72,18 +72,18 @@ ifeq ($(CONFIG_ARM_TOOLCHAIN_CLANG),y)
 
   ifeq ($(CONFIG_ARCH_CORTEXM4),y)
     ifeq ($(CONFIG_ARCH_FPU),y)
-      TOOLCHAIN_MARCH += --config armv7em_hard_fpv4_sp_d16_nosys
+      TOOLCHAIN_CLANG_CONFIG = --config armv7em_hard_fpv4_sp_d16
     else
-      TOOLCHAIN_MARCH += --config armv7em_soft_nofp_nosys
+      TOOLCHAIN_CLANG_CONFIG = --config armv7em_soft_nofp
     endif
   else ifeq ($(CONFIG_ARCH_CORTEXM7),y)
     ifeq ($(CONFIG_ARCH_FPU),y)
-      TOOLCHAIN_MARCH += --config armv7em_hard_fpv5_d16_nosys
+      TOOLCHAIN_CLANG_CONFIG = --config armv7em_hard_fpv5_d16
     else
-      TOOLCHAIN_MARCH += --config armv7em_soft_nofp_nosys
+      TOOLCHAIN_CLANG_CONFIG = --config armv7em_soft_nofp
     endif
   else # ifeq ($(CONFIG_ARCH_CORTEXM3),y)
-      TOOLCHAIN_MARCH += --config armv7m_soft_nofp_nosys
+      TOOLCHAIN_CLANG_CONFIG = --config armv7m_soft_nofp
   endif
 
 else ifeq ($(CONFIG_ARM_TOOLCHAIN_ARMCLANG),y)
diff --git a/arch/arm/src/armv8-m/Toolchain.defs b/arch/arm/src/armv8-m/Toolchain.defs
index 7a4d92d777..79bc8c6985 100644
--- a/arch/arm/src/armv8-m/Toolchain.defs
+++ b/arch/arm/src/armv8-m/Toolchain.defs
@@ -109,30 +109,30 @@ endif
 ifeq ($(CONFIG_ARM_TOOLCHAIN_CLANG),y)
 
   ifeq ($(CONFIG_ARCH_CORTEXM23),y)
-    TOOLCHAIN_MARCH += --config armv8m.main_soft_nofp_nosys
+    TOOLCHAIN_CLANG_CONFIG = --config armv8m.main_soft_nofp
   else ifeq ($(CONFIG_ARCH_CORTEXM33),y)
     ifeq ($(CONFIG_ARCH_FPU),y)
-      TOOLCHAIN_MARCH += --config armv8m.main_hard_fp_nosys
+      TOOLCHAIN_CLANG_CONFIG = --config armv8m.main_hard_fp
     else
-      TOOLCHAIN_MARCH += --config armv8m.main_soft_nofp_nosys
+      TOOLCHAIN_CLANG_CONFIG = --config armv8m.main_soft_nofp
     endif
   else ifeq ($(CONFIG_ARCH_CORTEXM35P),y)
     ifeq ($(CONFIG_ARCH_FPU),y)
-      TOOLCHAIN_MARCH += --config armv8m.main_hard_fp_nosys
+      TOOLCHAIN_CLANG_CONFIG = --config armv8m.main_hard_fp
     else
-      TOOLCHAIN_MARCH += --config armv8m.main_soft_nofp_nosys
+      TOOLCHAIN_CLANG_CONFIG = --config armv8m.main_soft_nofp
     endif
   else ifeq ($(CONFIG_ARCH_CORTEXM55),y)
     ifeq ($(CONFIG_ARCH_FPU),y)
-      TOOLCHAIN_MARCH += --config armv8.1m.main_hard_fp_nosys
+      TOOLCHAIN_CLANG_CONFIG = --config armv8.1m.main_hard_fp
     else
-      TOOLCHAIN_MARCH += --config armv8.1m.main_soft_nofp_nomve_nosys
+      TOOLCHAIN_CLANG_CONFIG = --config armv8.1m.main_soft_nofp_nomve
     endif
   else ifeq ($(CONFIG_ARCH_CORTEXM85),y)
     ifeq ($(CONFIG_ARCH_FPU),y)
-      TOOLCHAIN_MARCH += --config armv8.1m.main_hard_fp
+      TOOLCHAIN_CLANG_CONFIG = --config armv8.1m.main_hard_fp
     else
-      TOOLCHAIN_MARCH += --config armv8.1m.main_soft_nofp_nomve
+      TOOLCHAIN_CLANG_CONFIG = --config armv8.1m.main_soft_nofp_nomve
     endif
   endif
 
diff --git a/arch/arm/src/cmake/Toolchain.cmake b/arch/arm/src/cmake/Toolchain.cmake
index f61e266349..3d3de23681 100644
--- a/arch/arm/src/cmake/Toolchain.cmake
+++ b/arch/arm/src/cmake/Toolchain.cmake
@@ -89,15 +89,13 @@ endif()
 
 # override the ARCHIVE command
 
-set(CMAKE_C_ARCHIVE_CREATE "<CMAKE_AR> rcs -o <TARGET> <LINK_FLAGS> <OBJECTS>")
-set(CMAKE_CXX_ARCHIVE_CREATE
-    "<CMAKE_AR> rcs -o <TARGET> <LINK_FLAGS> <OBJECTS>")
-set(CMAKE_ASM_ARCHIVE_CREATE
-    "<CMAKE_AR> rcs -o <TARGET> <LINK_FLAGS> <OBJECTS>")
+set(CMAKE_C_ARCHIVE_CREATE "<CMAKE_AR> rcs <TARGET> <LINK_FLAGS> <OBJECTS>")
+set(CMAKE_CXX_ARCHIVE_CREATE "<CMAKE_AR> rcs <TARGET> <LINK_FLAGS> <OBJECTS>")
+set(CMAKE_ASM_ARCHIVE_CREATE "<CMAKE_AR> rcs <TARGET> <LINK_FLAGS> <OBJECTS>")
 
 # Architecture flags
 
-add_link_options(--entry=__start)
+add_link_options(-Wl,--entry=__start)
 add_link_options(-nostdlib)
 add_compile_options(-fno-common)
 add_compile_options(-Wall -Wshadow -Wundef)
@@ -200,13 +198,13 @@ endif()
 
 if(NOT EXISTS_FLAGS)
   set(CMAKE_ASM_FLAGS
-      "${CMAKE_ASM_FLAGS}${ARCHCFLAGS}"
+      "${CMAKE_ASM_FLAGS} ${ARCHCFLAGS}"
       CACHE STRING "" FORCE)
   set(CMAKE_C_FLAGS
-      "${CMAKE_C_FLAGS}${ARCHCFLAGS}"
+      "${CMAKE_C_FLAGS} ${ARCHCFLAGS}"
       CACHE STRING "" FORCE)
   set(CMAKE_CXX_FLAGS
-      "${CMAKE_CXX_FLAGS}${ARCHCXXFLAGS}"
+      "${CMAKE_CXX_FLAGS} ${ARCHCXXFLAGS}"
       CACHE STRING "" FORCE)
 endif()
 
diff --git a/arch/arm/src/cmake/armv7-m.cmake b/arch/arm/src/cmake/armv7-m.cmake
index 3d6706fd0a..74dcd06fd2 100644
--- a/arch/arm/src/cmake/armv7-m.cmake
+++ b/arch/arm/src/cmake/armv7-m.cmake
@@ -55,18 +55,18 @@ if(CONFIG_ARCH_TOOLCHAIN_CLANG)
 
   if(CONFIG_ARCH_CORTEXM4)
     if(CONFIG_ARCH_FPU)
-      string(APPEND ARCHFLAGS "--config armv7em_hard_fpv4_sp_d16_nosys")
+      string(APPEND ARCHFLAGS "--config armv7em_hard_fpv4_sp_d16.cfg")
     else()
-      string(APPEND ARCHFLAGS "--config armv7em_soft_nofp_nosys")
+      string(APPEND ARCHFLAGS "--config armv7em_soft_nofp.cfg")
     endif()
   elseif(CONFIG_ARCH_CORTEXM7)
     if(CONFIG_ARCH_FPU)
-      string(APPEND ARCHFLAGS "--config armv7em_hard_fpv5_d16_nosys")
+      string(APPEND ARCHFLAGS "--config armv7em_hard_fpv5.cfg")
     else()
-      string(APPEND ARCHFLAGS "--config armv7em_soft_nofp_nosys")
+      string(APPEND ARCHFLAGS "--config armv7em_soft_nofp.cfg")
     endif()
   else()
-    string(APPEND ARCHFLAGS "--config armv7em_soft_nofp_nosys")
+    string(APPEND ARCHFLAGS "--config armv7em_soft_nofp.cfg")
   endif()
 
   if(NOT "${CMAKE_C_FLAGS}" STREQUAL "" AND NOT "${ARCHFLAGS}" STREQUAL "")
@@ -75,13 +75,13 @@ if(CONFIG_ARCH_TOOLCHAIN_CLANG)
 
   if(NOT EXISTS_FLAGS)
     set(CMAKE_ASM_FLAGS
-        "${CMAKE_ASM_FLAGS}${ARCHFLAGS}"
+        "${CMAKE_ASM_FLAGS} ${ARCHFLAGS}"
         CACHE STRING "" FORCE)
     set(CMAKE_C_FLAGS
-        "${CMAKE_C_FLAGS}${ARCHFLAGS}"
+        "${CMAKE_C_FLAGS} ${ARCHFLAGS}"
         CACHE STRING "" FORCE)
     set(CMAKE_CXX_FLAGS
-        "${CMAKE_CXX_FLAGS}${ARCHFLAGS}"
+        "${CMAKE_CXX_FLAGS} ${ARCHFLAGS}"
         CACHE STRING "" FORCE)
   endif()
 endif()
diff --git a/arch/arm/src/cmake/platform.cmake b/arch/arm/src/cmake/platform.cmake
index e013f1c764..7463745b74 100644
--- a/arch/arm/src/cmake/platform.cmake
+++ b/arch/arm/src/cmake/platform.cmake
@@ -102,4 +102,5 @@ endif()
 
 set_property(GLOBAL APPEND PROPERTY NUTTX_EXTRA_LIBRARIES ${EXTRA_LIB})
 
-set(PREPROCES ${CMAKE_C_COMPILER} ${CMAKE_C_FLAGS} -E -P -x c)
+separate_arguments(CMAKE_C_FLAG_ARGS NATIVE_COMMAND ${CMAKE_C_FLAGS})
+set(PREPROCES ${CMAKE_C_COMPILER} ${CMAKE_C_FLAG_ARGS} -E -P -x c)
diff --git a/arch/arm/src/common/Toolchain.defs b/arch/arm/src/common/Toolchain.defs
index af15fc3074..98868391fd 100644
--- a/arch/arm/src/common/Toolchain.defs
+++ b/arch/arm/src/common/Toolchain.defs
@@ -164,6 +164,18 @@ ifeq ($(CONFIG_ARM_TOOLCHAIN_CLANG),y)
 
   ARCHOPTIMIZATION += -fno-builtin
 
+  ifneq ($(TOOLCHAIN_CLANG_CONFIG),)
+    ifeq ($(CLANGVER),)
+      export CLANGVER := $(shell $(CC) --version | grep "clang version" | sed -r "s/.* ([0-9]+\.[0-9]+).*/\1/")
+    endif
+
+    ifeq ($(CLANGVER),14.0)
+      TOOLCHAIN_CLANG_CONFIG := $(TOOLCHAIN_CLANG_CONFIG)_nosys
+    endif
+
+    ARCHCPUFLAGS += $(TOOLCHAIN_CLANG_CONFIG).cfg
+  endif
+
 # ARM Compiler Clang toolchain
 
 else ifeq ($(CONFIG_ARM_TOOLCHAIN_ARMCLANG),y)
diff --git a/arch/arm/src/tlsr82/Toolchain.defs b/arch/arm/src/tlsr82/Toolchain.defs
index 410eae8aa9..50f730f00f 100644
--- a/arch/arm/src/tlsr82/Toolchain.defs
+++ b/arch/arm/src/tlsr82/Toolchain.defs
@@ -21,7 +21,7 @@
 # Clang Configuration files
 
 ifeq ($(CONFIG_ARM_TOOLCHAIN_CLANG),y)
-  TOOLCHAIN_MARCH := --config armv6m_soft_nofp_nosys
+  TOOLCHAIN_CLANG_CONFIG = --config armv6m_soft_nofp
 endif
 
 # Generic GNU EABI toolchain